VVacuum chamber and structural components: deposition chamber, machine frame, base, flange, etc.
Gas and fluid management system: body distributors, valve bodies, spray heads, pipe connection components, etc.
Heat dissipation and temperature control module: cooling plate, heat exchanger, etc.
Precision motion and transmission components: wafer handling arm, end effector of the manipulator, linear slide table, etc.
Wafer fixtures and base: Wafer suction cups, support rings, positioners, etc.
Electrical insulation and structural components: insulating sleeves, connectors, equipment enclosures, observation windows, etc.
Corrosion-resistant fluid components: the inner linings of the tanks in wet etching equipment, seals, pump and valve components, etc.
Highly wear-resistant transmission components: gears, guides, sliders, bearings, etc.
