Vacuum chamber and structural components: deposition chamber, machine frame, base, flange, etc. < br>
Gas and fluid management system: body distributors, valve bodies, spray heads, pipe connection components, etc. < br>
Heat dissipation and temperature control module: cooling plate, heat exchanger, etc. < br>
Precision motion and transmission components: wafer handling arm, end effector of the manipulator, linear slide table, etc. < br>
Wafer fixtures and base: Wafer suction cups, support rings, positioners, etc. br>
Electrical insulation and structural components: insulating sleeves, connectors, equipment enclosures, observation windows, etc. < br>
Corrosion-resistant fluid components: the inner linings of the tanks in wet etching equipment, seals, pump and valve components, etc. < br>
Highly wear-resistant transmission components: gears, guides, sliders, bearings, etc.
